質量分析と精製技術
オープンアクセス

概要

Mass Separation of AuGe-LMIS Using a New Principle: Rotating Electric Fields

Masashi Nojima, Tokio Norikawa and Naoya Kishimoto

We have been developing a new principle type mass analyzer using two rotating electric fields (REFs). This mass analyzer can realize the continuous mass separation of ion beams with free mass range and simultaneous detection on two-dimensional (2D) plane. In this article, we aimed to mass separate AuGe liquid metal ion source (LMIS) on proper frequencies. Then, we simulated ion trajectories in REFs by theoretical calculations and identified the origins of each annular ring pattern. Finally, we confirmed the certainty of the theoretical calculations by time-of-Fight secondary-ion-mass-spectrometry (TOF-SIMS) imaging of printed AuGe annular ring patterns on Si wafer.